1. Mhedziso yezvino yakazara tekinoroji mamiriro esilicon based LEDs

Kukura kwezvinhu zveGaN pasilicon substrates kunotarisana nematambudziko maviri makuru ehunyanzvi. Chekutanga, lattice mismatch inosvika 17% pakati pesilicon substrate neGaN inoguma nepamusoro dislocation density mukati meGaN zvinhu, izvo zvinokanganisa luminescence kushanda zvakanaka; Chechipiri, pane kupisa kusawirirana kunosvika 54% pakati pesilicon substrate neGaN, izvo zvinoita kuti mafirimu eGaN atadze kutsemuka mushure mekukura kwekushisa kwepamusoro uye kudonha kusvika kune tembiricha, zvichikanganisa goho rekugadzira. Naizvozvo, kukura kweiyo buffer layer pakati pesilicon substrate neGaN nhete firimu kwakakosha zvakanyanya. Iyo buffer layer inoita basa mukudzikisa dislocation density mukati meGaN uye kuderedza GaN kuparuka. Kusvika pamwero mukuru, iyo tekinoroji yeiyo buffer layer inotaridza iyo yemukati quantum kunyatsoshanda uye goho rekugadzira re LED, inova inotarisisa uye kuoma kwesilicon-yakavakirwa.LED. Parizvino, nekudyara kwakakosha mukutsvaga nekusimudzira kubva kuindasitiri nedzidzo, dambudziko iri retekinoroji rakakundwa.

Iyo silicon substrate inobata zvakasimba chiedza chinooneka, saka iyo GaN firimu inofanira kuendeswa kune imwe substrate. Usati waendeswa, chepamusoro chekuratidzira chinoratidzira chinoiswa pakati pefirimu reGaN uye imwe substrate kudzivirira chiedza chinobudiswa neGaN kubva pakubatwa ne substrate. Iyo LED chimiro mushure mekutamisa substrate inozivikanwa muindasitiri seTin Firimu chip. Matete firimu machipisi ane mabhenefiti pamusoro pechinyakare echinyakare chimiro machipisi maererano nekupararira kwazvino, kupisa conductivity, uye kufanana kwemavara.

2. Mhedziso yemamiriro ekushandiswa kwese kwazvino uye kutarisisa kwemusika kwesilicon substrate LEDs

Silicon yakavakirwa maLED ane chimiro chakamira, yunifomu ikozvino kugovera, uye nekukurumidza kupararira, zvichiita kuti ive yakakodzera kune yakakwirira-simba maapplication. Nekuda kwekubuda kwechiedza chedivi rimwe chete, gwara rakanaka, uye mwenje wemhando, inonyanya kukodzera kuvhenekesa nhare semwenje wemotokari, marambi ekutsvaga, marambi emigodhi, mwenje wenharembozha, uye minda yekuvhenekesa yepamusoro ine mwenje wemhando yepamusoro zvinodiwa. .

Iyo tekinoroji uye maitiro eJingneng Optoelectronics silicon substrate LED yave yakakura. Pahwaro hwekuenderera mberi nekuchengetedza mabhenefiti anotungamira mumunda wesilicon substrate mwenje weblue LED machipisi, zvigadzirwa zvedu zvinoramba zvichiwedzera kune mwenje minda inoda mwenje wekutungamira uye yemhando yepamusoro kubuda, senge chena mwenje LED machipisi ane mashandiro epamusoro uye kukosha kwakawedzerwa. , LED nhare mbozha mwenje mwenje, mwenje wemotokari ye LED, mwenje wemugwagwa we LED, mwenje we LED, nezvimwe, zvishoma nezvishoma uchimisikidza yakanakira nzvimbo yesilicon substrate LED machipisi muchikamu cheindasitiri.

3. Development maitiro kufanotaura kwesilicon substrate LED

Kuvandudza kushanda kwechiedza, kuderedza mari kana kudhura-inoshanda dingindira risingaperi muneLED indasitiri. Silicon substrate yakaonda firimu machipisi inofanira kuiswa mukati isati yaiswa, uye mutengo wekurongedza maakaundi echikamu chikuru cheiyo LED application mutengo. Svetuka chinyakare kurongedza uye rongedza zvakananga zvikamu pane wafer. Mune mamwe mazwi, chip scale packaging (CSP) pawafer inogona kusvetuka kupera kwekurongedza uye yakananga kumagumo ekushandisa kubva kumagumo echip, zvichiwedzera kudzikisa mutengo wekushandisa we LED. CSP ndeimwe yetarisiro yeGaN yakavakirwa maLEDs pasilicon. Makambani epasi rese akadai saToshiba uye Samsung ataura achishandisa silicon yakavakirwa maLED eCSP, uye zvinotendwa kuti zvigadzirwa zvine hukama zvichave kuwanikwa mumusika.

Mumakore achangopfuura, imwe nzvimbo inopisa muindasitiri ye LED ndeye Micro LED, inozivikanwawo se micrometer level LED. Saizi yeMicro LEDs inotangira kubva padiki mamicrometer kusvika kumakumi emamicrometer, anenge ari padanho rakafanana nerekukora kwemafirimu matete eGaN anokura ne epitaxy. Pachiyero chemicrometer, zvigadzirwa zveGaN zvinogona kugadzirwa zvakananga kuita GaNLED yakatwasuka pasina kudiwa kwekutsigirwa. Kureva kuti, mukugadzira Micro LEDs, iyo substrate yekukura GaN inofanira kubviswa. Mukana wechisikigo wesilicon based LEDs ndeyekuti iyo silicon substrate inogona kubviswa nekemikari yakanyorova etching yega, pasina kukanganisa paGaN zvinhu panguva yekubvisa, kuve nechokwadi chegoho uye kuvimbika. Kubva pamaonero aya, silicon substrate LED tekinoroji inosungirwa kuve nenzvimbo mumunda weMicro LEDs.