Chiiled chip? Saka ndeapi maitiro ayo? LED chip kugadzira inonyanya kugadzira inoshanda uye yakavimbika yakaderera ohmic contact electrode, kusangana nediki voltage inodonha pakati pezvinhu zvinobatika, inopa kumanikidza mapadhi ewelding waya, uye kubudisa mwenje zvakanyanya sezvinobvira. Iyo firimu shanduko nzira inowanzo shandisa vacuum evaporation nzira. Pasi pe 4pa high vacuum, zvinhu zvinonyungudutswa nekudziisa kupisa kana electron beam bombardment heat method, uye bZX79C18 inova mhute yesimbi uye inoiswa pamusoro pe semiconductor zvinhu pasi pekumanikidzwa kwakaderera.

Kazhinji, iyo p-mhando yekubatanidza simbi inoshandiswa inosanganisira Aube, auzn uye mamwe alloys, uye n-side yekubatanidza simbi inowanzo tora AuGeNi alloy. Iyo yekusangana kweiyo electrode uye yakafumurwa alloy layer inogona kuzadzisa zvinodikanwa zveiyo lithography process. Mushure mekuita photolithography, iyo zvakare kuburikidza nealloying process, iyo inowanzoitwa pasi pekuchengetedzwa kweH2 kana N2. Iyo alloying nguva uye tembiricha zvinowanzotemwa zvinoenderana nehunhu hwesemiconductor zvinhu uye chimiro che alloy vira. Ehe, kana iyo chip electrode process seyebhuruu negirini yakanyanya kuoma, passive firimu kukura uye plasma etching process inoda kuwedzerwa.

Mukugadzira nzira ye LED chip, ndeipi maitiro ane zvakakosha pakuita kwayo photoelectric performance?

Kazhinji kutaura, mushure mekupera kweLED epitaxial kugadzirwa, maitiro ayo makuru emagetsi akapedzwa, uye kugadzirwa kwechip hakuzoshandure hunhu hwayo hwenyukireya, asi mamiriro asina kunaka mukuita kwekuputira uye alloying achaita kuti mamwe akashata emagetsi paramita. Semuenzaniso, yakaderera kana yakakwira alloying tembiricha inokonzeresa kushomeka kweohmic kubata, ndicho chikonzero chikuru cheiyo yakakwira kumberi voltage inodonha VF mukugadzira chip. Mushure mekucheka, kana mamwe maitiro ekuora akaitwa pamucheto we chip, zvichave zvinobatsira kuvandudza reverse kuvuza kwechip. Izvi zvinodaro nekuti mushure mekucheka nedhaimondi rinokuya vhiri blade, marara akawanda nehupfu zvicharamba zviri pamucheto wechip. Kana izvi zvakanamatira kuPN junction ye LED chip, zvinokonzeresa kubuda kwemagetsi uye kunyange kuparara. Uye zvakare, kana iyo photoresist iri pamusoro peiyo chip haina kubviswa yakachena, zvinokonzeresa kunetsa kumberi kwewelding uye welding yenhema. Kana iri kumusana, inokonzerawo kudonha kwepamusoro. Mukuita kugadzirwa kwechip, kusimba kwechiedza kunogona kuvandudzwa nekukwesha kwepamusoro uye nekuipatsanura kuita inverted trapezoidal chimiro.

Sei machipisi e LED achifanira kugoverwa muhukuru hwakasiyana? Ndeapi mhedzisiro yehukuru pane iyo photoelectric kuita kwe LED?

LED chip size inogona kukamurwa kuita yakaderera-simba chip, yepakati simba chip uye yakakwirira-simba chip zvinoenderana nesimba. Zvinoenderana nezvinodiwa nevatengi, inogona kukamurwa kuita imwechete chubhu level, digital level, dot matrix level uye yekushongedza mwenje. Kana iri saizi chaiyo ye chip, inotarwa zvinoenderana neiyo chaiyo yekugadzira nhanho yeakasiyana ekugadzira chip, uye hapana chakananga chinodiwa. Chero bedzi maitiro achipfuura, iyo chip inogona kuvandudza iyo unit inobuda uye kuderedza mutengo, uye iyo photoelectric kuita hakuzoshanduke zvakanyanya. Iko kushandiswa ikozvino kwechip kunonyatso hukama kune ikozvino density inoyerera kuburikidza nechip. Kana iyo chip idiki, iko kushandiswa ikozvino idiki, uye kana chip yakakura, kushandiswa ikozvino kwakakura. Uniti yavo yazvino density yakangofanana. Tichifunga kuti kupisa kupisa ndiro dambudziko guru pasi pepamusoro pemazuva ano, kushanda kwayo kunopenya kwakaderera kudarika kuderera kwezvino. Kune rumwe rutivi, sezvo nzvimbo inowedzera, kupikisa kwemuviri kwechip kunoderera, saka kuenderera mberi kune voltage kunoderera.

Ndeipi nzvimbo ye LED yakakwira-simba chip? Sei?

Led high-power chipsnokuti chiedza chichena chinowanzoita 40mil pamusika. Iyo inonzi simba rekushandisa repamusoro-simba machipisi kazhinji rinoreva simba remagetsi rinopfuura 1W. Sezvo kuwanda kwehuwandu huzhinji husingasviki 20%, simba guru remagetsi richashandurwa kuva simba rekupisa, saka kupisa kwekushisa kwepamusoro-simba chip kunokosha zvikuru, uye chip chinodikanwa kuti chive nenzvimbo huru.

Ndezvipi zvakasiyana zvinodiwa zvechip tekinoroji uye michina yekugadzira yekugadzira GaN epitaxial zvinhu zvichienzaniswa negap, GaAs uye InGaAlP? Sei?

Iwo ma substrates eakajairwa ma LED matsvuku uye yero machipisi uye anopenya Quad tsvuku uye yero machipisi anogadzirwa neakasanganiswa semiconductor zvinhu senge gap uye maGaAs, ayo anogona kazhinji kugadzirwa kuita n-mhando substrates. Iyo yekunyorova nzira inoshandiswa ku lithography, uye ipapo dhaimondi rinokuya vhiri rinoshandiswa kucheka chip. Iyo yebhuruu-girini chip yeGaN zvinhu isafire substrate. Nekuti iyo safire substrate yakavharirwa, haigone kushandiswa sedanda rimwe re LED. Izvo zvinodikanwa kugadzira p / N electrodes pane epitaxial pamusoro panguva imwe chete kuburikidza yakaoma etching maitiro, uye mamwe passivation maitiro. Nekuti safiya yakaoma kwazvo, zvinonetsa kudhirowa machipisi ane diamond grinding vhiri blade. Yayo tekinoroji maitiro anowanzo akawanda uye akaomarara kupfuura ayo e LED akagadzirwa gap uye GaAs zvinhu.

Chii chimiro uye maitiro e "transparent electrode" chip?

Iyo inonzi transparent electrode inofanirwa kuve conductive uye yakajeka. Ichi chinyorwa ikozvino chave kushandiswa zvakanyanya mune yemvura crystal kugadzira maitiro. Iro zita rekuti indium tin oxide, rakadimburirwa seITO, asi haigone kushandiswa senge solder pad. Munguva yekugadzira, ohmic electrode ichaitwa pamusoro peiyo chip, ipapo dhizaini yeITO ichavharwa pamusoro, uye ipapo dhizaini yewelding pad ichaputirwa pamusoro peITO. Nenzira iyi, ikozvino kubva kumutungamiri inogoverwa zvakaenzana kune imwe neimwe ohmic contact electrode kuburikidza neITO layer. Panguva imwecheteyo, nokuti refractive index yeITO iri pakati pe refractive index yemhepo uye epitaxial zvinhu, chiedza chechiedza chinogona kuvandudzwa uye chiedza chinopenya chinogona kuwedzerwa.

Chii chinonzi chip tekinoroji yemwenje semiconductor?

Nekuvandudzwa kweiyo semiconductor LED tekinoroji, kushandiswa kwayo mumunda wekuvhenekesa kunowedzera uye zvakanyanya, kunyanya kubuda kweiyo chena LED yave nzvimbo inopisa yekuvhenekesa semiconductor. Nekudaro, iyo kiyi chip uye yekurongedza tekinoroji inoda kuvandudzwa. Panyaya ye chip, isu tinofanirwa kusimudzira takananga kusimba repamusoro, kupenya kwakanyanya uye kudzikisa kupisa kwekupisa. Kuwedzera simba kunoreva kuti kushandiswa ikozvino kwechip kunowedzera. Iyo yakananga nzira ndeyekuwedzera chip size. Iye zvino machipisi epamusoro-soro ari 1mm × 1mm kana zvakadaro, uye kushanda ikozvino 350mA Nekuda kwekuwedzera kwekushandisa ikozvino, dambudziko rekupisa kupisa rave dambudziko rakakurumbira. Iye zvino dambudziko iri rinogadziriswa nenzira ye chip flip. Nekuvandudzwa kwe LED tekinoroji, kushandiswa kwayo mumunda wekuvhenekesa kuchasangana nemukana usina kumboitika uye dambudziko.

Chii chinonzi flip chip? Chimiro chayo chii? Ndezvipi zvakanakira zvayo?

Bhuruu LED kazhinji inotora Al2O3 substrate. Al2O3 substrate ine yakanyanya kuoma uye yakaderera yekupisa conductivity. Kana ikatora chimiro chepamutemo, kune rumwe rutivi, ichaunza anti-static matambudziko; kune rumwe rutivi, kupisa kupisa kuchavawo dambudziko guru pasi pepamusoro ikozvino. Panguva imwecheteyo, nokuti electrode yepamberi iri kumusoro, chimwe chiedza chichavharwa, uye chiedza chinopenya chichaderedzwa. Simba guru rebhuruu LED inogona kuwana yakawedzera mwenje kubuda kuburikidza ne chip flip chip tekinoroji pane yechinyakare yekurongedza tekinoroji.

Parizvino, iyo mainstream flip chip chimiro nzira ndeye: kutanga, gadzirira yakakura-saizi yebhuruu LED chip ine eutectic welding electrode, gadzirira silicon substrate yakakura zvishoma pane yebhuruu LED chip, uye gadzira goridhe conductive layer uye kutungamira kunze waya layer ( ultrasonic goridhe waya bhora solder joint) ye eutectic welding pairi. Zvadaro, iyo yepamusoro-simba yebhuruu LED chip uye silicon substrate inobatanidzwa pamwechete ne eutectic welding michina.

Chimiro chechimiro ichi ndechokuti epitaxial layer inosangana zvakananga nesilicon substrate, uye kupisa kwekushisa kwesilicon substrate yakaderera zvikuru kupfuura yesapphire substrate, saka dambudziko rekupisa kupisa rinogadziriswa zvakanaka. Nekuti iyo sapphire substrate inotarisana kumusoro mushure mekukwirisa, inova mwenje inoburitsa nzvimbo, uye safiri inoonekera, saka dambudziko rekuburitsa chiedza rinogadziriswa zvakare. Izvo zviri pamusoro ndiyo ruzivo rwakakodzera rwe LED tekinoroji. Ndinotenda kuti nekuvandudzwa kwesainzi uye tekinoroji, marambi emangwana e LED anowedzera uye anowedzera, uye hupenyu hwebasa huchavandudzwa zvakanyanya, izvo zvichatiunzira nyore nyore.