Chii chinonzi anChipo che LED? Saka ndeapi maitiro ayo?LED chip kugadzirainonyanya kugadzira inoshanda uye yakavimbika yakaderera ohm yekubata electrode, kusangana neiyo diki voltage kudonha pakati pezvinobatika zvinhu, kupa iyo yekumanikidza padhi yewaya yewelding, uye panguva imwe chete, chiedza chakawanda sezvinobvira. Iyo shanduko yefirimu maitiro inowanzo shandisa vacuum evaporation nzira. Pasi pe4Pa high vacuum, zvinhu zvacho zvinonyungudutswa nekudziisa kupisa kana electron beam bombardment heat, uye BZX79C18 inoshandurwa kuita mhute yesimbi kuisa pamusoro pezvinhu zve semiconductor pasi pekumanikidzwa kwakaderera.

Masimbi anowanzo shandiswa eP-type anosanganisira AuBe, AuZn nemamwe maalloys, uye masimbi ekubatira paN-side anowanzova maAuGeNi alloys. Iyo alloy layer yakaumbwa mushure mekuputira inodawo kuburitsa nzvimbo inopenya zvakanyanya sezvinobvira kuburikidza nephotolithography, kuitira kuti iyo yakasara alloy layer inogona kusangana nezvinodiwa zveinoshanda uye yakavimbika yakaderera ohm kuonana neelectrode uye welding line pad. Mushure mekuita kwephotolithography kwapera, iyo alloying process ichaitwa pasi pekuchengetedzwa kweH2 kana N2. Iyo nguva uye tembiricha yealloying inowanzotemwa zvichienderana nehunhu hwesemiconductor zvinhu uye chimiro che alloy vira. Ehe, kana iyo chip electrode process yakadai seblue-girini yakanyanya kuoma, iyo passive firimu kukura uye plasma etching process inoda kuwedzerwa.

Mune iyo LED chip yekugadzira maitiro, ndeapi maitiro ane zvakakosha pakuita kwayo photoelectric kuita?

Kazhinji kutaura, mushure mekupedzwa kwekugadzirwa kwe LED epitaxial, kuita kwayo kukuru kwemagetsi kwakapedzwa. Iyo chip kugadzira haizo shandura iyo yepakati kugadzirwa hunhu, asi mamiriro asina kunaka mukuputira uye alloying maitiro achaita kuti mamwe magetsi emagetsi ave murombo. Semuyenzaniso, yakaderera kana yakakwira alloying tembiricha inokonzeresa kushomeka kweohmic kubata, ndicho chikonzero chikuru chekudonha kumberi kwevoltage VF mukugadzira chip. Mushure mekucheka, kana imwe etching process ikaitwa pamupendero we chip, zvichave zvinobatsira kuvandudza reverse kuvuza kwechip. Izvi zvinodaro nekuti mushure mekucheka nedhaimondi grinding vhiri blade, pachava nemarara akawanda ehupfu inosara pamupendero wechip. Kana zvimedu izvi zvakanamatira kuPN junction ye LED chip, zvinokonzeresa kubuda kwemagetsi, kana kuparara. Uye zvakare, kana iyo photoresist iri pane chip pamusoro isina kupepetwa zvakachena, zvinokonzeresa kunetsa pamberi pewaya bonding uye soldering yenhema. Kana iri kumashure, inokonzeresawo kudonha kwakanyanya. Mukugadzira chip chip, kusimba kwechiedza kunogona kuvandudzwa kuburikidza nekukwesha kwepamusoro uye kucheka kuita inverted trapezoid chimiro.

Sei machipisi e LED akakamurwa kuita hukuru hwakasiyana? Ndezvipi zvinokonzerwa nehukuru paLED photoelectricperformance?

LED chip size inogona kukamurwa kuita diki simba chip, yepakati simba chip uye yakakwirira simba chip zvinoenderana nesimba. Zvinoenderana nezvinodiwa nevatengi, inogona kukamurwa kuita imwechete chubhu level, digital level, lattice level uye yekushongedza mwenje uye mamwe mapoka. Iyo chaiyo saizi ye chip inotsamira pane chaiyo yekugadzira nhanho yevakasiyana chip vanogadzira, uye hapana chakananga chinodiwa. Chero bedzi maitiro acho achikodzera, iyo chip inogona kuvandudza iyo unit inobuda uye kuderedza mutengo, uye iyo photoelectric kuita hakuzoshanduke zvakanyanya. Ikozvino inoshandiswa ne chip inonyatso hukama kune ikozvino density inoyerera kuburikidza nechip. Ikozvino inoshandiswa ne chip idiki uye ikozvino inoshandiswa ne chip yakakura. Uniti yavo yazvino density yakangofanana. Tichifunga kuti kupisa kupisa ndiro dambudziko guru pasi pepamusoro pemazuva ano, kushanda kwayo kunopenya kwakaderera pane iyo pasi pemazuva mashoma. Kune rumwe rutivi, sezvo nzvimbo inowedzera, kupikisa kwevhoriyamu kwechip kunoderera, saka iyo yekumberi conduction voltage inoderera.

Ndeipi saizi chip iyo LED yakakwira-simba chip inowanzoreva? Sei?

LED dzepamusoro-simba machipisi anoshandiswa mwenje chena anowanzo kuoneka pamusika paanenge 40 mils, uye anonzi machipisi epamusoro-simba kazhinji anoreva kuti simba remagetsi rinopfuura 1W. Sezvo huwandu hwehuwandu hwehuwandu hunowanzove husingasviki makumi maviri muzana, simba remagetsi rakawanda richashandurwa kuva simba rekupisa, saka kupisa kwekushisa kwemachipisi ane simba guru kwakakosha zvikuru, kunoda nzvimbo yakakura yechip.

Ndezvipi zvakasiyana zvinodiwa zve chip process uye michina yekugadzira yekugadzira GaN epitaxial zvinhu zvichienzaniswa neGaP, GaAs uye InGaAlP? Sei?

Iwo ma substrates eakajairwa ma LED matsvuku uye yero machipisi uye anopenya equaternary tsvuku uye yero machipisi anogadzirwa neGaP, GaAs uye zvimwe zvakasanganiswa semiconductor zvinhu, izvo zvinowanzo gadzirwa kuita N-mhando substrates. Iyo yekunyorova nzira inoshandiswa kufotolithography, uye gare gare dhaimondi vhiri blade rinoshandiswa kucheka kuita machipisi. Iyo yebhuruu-girini chip yeGaN zvinhu isafire substrate. Nekuti iyo safire substrate yakavharirwa, haigone kushandiswa sedanda re LED. Iyo P/N maelectrodes anofanirwa kugadzirwa pane epitaxial pamusoro panguva imwe chete kuburikidza neyakaoma etching process uye zvakare kuburikidza nedzimwe passivation maitiro. Nekuda kwekuti masafiro akaomarara, zvakaoma kucheka machipisi nemadhaimondi ekukuya mavhiri. Maitiro ayo anowanzo kuomarara kupfuura ayo eGaP neGaAs maLED.

Chii chimiro uye maitiro e "transparent electrode" chip?

Iyo inonzi inonzi transparent electrode inofanira kukwanisa kuitisa magetsi uye chiedza. Ichi chinyorwa ikozvino chave kushandiswa zvakanyanya mune yemvura crystal kugadzira maitiro. Iro zita rinonzi Indium Tin Oxide (ITO), asi haigone kushandiswa sewelding pad. Munguva yekugadzira, iyo ohmic electrode ichaitwa pane chip pamusoro, uye ipapo jira reITO richaputirwa pamusoro, uye ipapo dhizaini yewelding pad ichaputirwa pamusoro peITO. Nenzira iyi, ikozvino kubva kumutungamiri inogoverwa zvakaenzana kune imwe neimwe ohmic contact electrode kuburikidza neITO layer. Panguva imwecheteyo, sezvo ITO refractive index iri pakati pemhepo uye refractive index ye epitaxial material, chiedza chechiedza chinogona kuwedzerwa, uye chiedza chinopenya chinogonawo kuwedzerwa.

Chii chinonzi chip tekinoroji yemwenje semiconductor?

Nekuvandudzwa kweiyo semiconductor LED tekinoroji, mashandisirwo ayo mumunda wekuvhenekesa anowedzera uye zvakanyanya, kunyanya kubuda kweiyo chena LED, iyo yave iyo yekutarisa semiconductor mwenje. Nekudaro, iyo kiyi chip uye yekurongedza tekinoroji ichiri kuda kuvandudzwa, uye chip inofanira kuvandudzwa yakanangana nepamusoro pesimba, yakanyanya kupenya inoshanda uye yakaderera kupisa kupisa. Kuwedzera simba kunoreva kuwedzera ikozvino inoshandiswa ne chip. Iyo yakananga nzira ndeyekuwedzera chip size. Mazuva ano, machipisi epamusoro-soro ese ari 1mm × 1mm, uye ikozvino 350mA Nekuda kwekuwedzera kwekushandisa ikozvino, dambudziko rekupisa kupisa rave dambudziko rakakurumbira. Zvino dambudziko iri rakagadziriswa nechip flip. Nekuvandudza tekinoroji yeLED, kushandiswa kwayo mumunda wekuvhenekesa kuchasangana nemukana usina kumboitika uye dambudziko.

Chii chinonzi Flip Chip? Chimiro chayo chii? Ndezvipi zvakanakira zvayo?

Bhuruu LED inowanzo shandisa Al2O3 substrate. Al2O3 substrate ine yakanyanya kuoma, yakaderera yekupisa conductivity uye conductivity. Kana chimiro chakanaka chikashandiswa, kune rumwe rutivi, chinokonzera matambudziko e-anti-static, kune rumwe rutivi, kupisa kwekushisa kuchavawo dambudziko guru pasi pemamiriro ezvinhu epamusoro. Panguva imwecheteyo, nokuti electrode yepamberi yakatarisa kumusoro, chikamu chechiedza chichavharwa, uye chiedza chinopenya chichaderedzwa. Simba guru rebhuruu LED inogona kuwana yakawedzera mwenje kubuda pane yechinyakare yekurongedza tekinoroji kuburikidza nechip flip chip tekinoroji.

Iyo yazvino mainstream flip chimiro maitiro ndeye: kutanga, gadzirira yakakura saizi yebhuruu LED chip ine yakakodzera eutectic welding electrode, panguva imwe chete, gadzirira silicon substrate yakakura zvishoma pane yebhuruu LED chip, uye gadzira goridhe conductive layer uye lead waya. layer (ultrasonic goridhe waya bhora solder joint) ye eutectic welding. Zvadaro, iyo yepamusoro-simba yebhuruu LED chip uye iyo silicon substrate inobatanidzwa pamwechete uchishandisa eutectic welding michina.

Ichi chimiro chinoratidzwa neiyo epitaxial layer inobata zvakananga nesilicon substrate, uye kupisa kwekushisa kwesilicon substrate kwakadzika kwazvo kupfuura kwesapphire substrate, saka dambudziko rekupisa kupisa rinogadziriswa zvakanaka. Sezvo iyo substrate yesafiro yakatarisana kumusoro mushure mekushandura, inova iyo chiedza chinobuda pamusoro. Safiri iri pachena, saka dambudziko rekuburitsa chiedza rinogadziriswawo. Izvo zviri pamusoro ndiyo ruzivo rwakakodzera rwe LED tekinoroji. Ndinotenda kuti nekuvandudzwa kwesainzi uye tekinoroji, marambi e LED mune ramangwana anowedzera uye anoshanda zvakanyanya, uye hupenyu hwavo hwebasa huchavandudzwa zvakanyanya, zvichitiunzira nyore.