Chii chinonzi LED chip? Saka ndeapi maitiro ayo? Kugadzirwa kwemachipisi e LED kunonyanya kuitirwa kugadzira inoshanda uye yakavimbika yakaderera ohmic contact electrodes, iyo inogona kusangana nediki shoma voltage kudonha pakati pezvinhu zvekusangana uye kupa solder pads, uku ichiburitsa mwenje wakawanda sezvinobvira. Iyo firimu yekufambisa maitiro inowanzo shandisa vacuum evaporation nzira. Pasi pe 4Pa high vacuum, zvinhu zvinonyungudutswa nekudziisa kupisa kana electron beam bombardment heat method, uye BZX79C18 inoshandurwa kuita mhute yesimbi uye inoiswa pamusoro peiyo semiconductor zvinhu pasi pekumanikidzwa kwakaderera.
Iyo inowanzoshandiswa P-mhando yekubatanidza simbi inosanganisira alloys akadai seAuBe neAuZn, nepo N-side yekubatanidza simbi inowanzogadzirwa neAuGeNi alloy. Iyo alloy layer yakaumbwa mushure mekuputira inodawo kuburitsa nzvimbo inoburitsa chiedza sezvinobvira kuburikidza nephotolithography tekinoroji, kuitira kuti iyo yakasara alloy layer inogona kusangana nezvinodiwa zveanoshanda uye akavimbika yakaderera ohmic kuonana maelectrodes uye solder waya pads. Mushure mokunge photolithography yapera, nzira yekubatanidza inoitwawo, kazhinji pasi pekuchengetedzwa kweH2 kana N2. Iyo nguva uye tembiricha yealloying inowanzo tsanangurwa nezvinhu zvakaita senge hunhu hwesemiconductor zvinhu uye chimiro chechoto chealloy. Ehe, kana iyo electrode process yeblue-girini machipisi yakanyanya kuoma, passivation firimu kukura uye plasma etching maitiro anoda kuwedzerwa.

Mukugadzira maitiro e LED machipisi, ndeapi maitiro ane zvakakosha pakuita kwavo optoelectronic?
Kazhinji kutaura, mushure mekupedzwa kwekugadzirwa kwe LED epitaxial, midziyo yayo huru yemagetsi yakapedzwa, uye kugadzira chip hakuchinje hunhu hwayo. Nekudaro, mamiriro asina kufanira panguva yekupfeka uye alloying maitiro anogona kukonzera mamwe mashoma emagetsi paramita. Semuenzaniso, yakaderera kana yakakwira alloying tembiricha inogona kukonzera kushomeka ohmic kubata, ndicho chikonzero chikuru chekukwira kumberi kwevoltage kudonha VF mukugadzira chip. Mushure mekucheka, kuita mamwe maitiro ekuora pamipendero ye chip kunogona kubatsira mukuvandudza reverse kuvuza kwechip. Izvi zvinodaro nekuti mushure mekucheka nedhaimondi rinokuya vhiri blade, pachava nehuwandu hwakawanda hwemarara hupfu hunosara pamucheto wechip. Kana izvi zvimedu zvakanamatira kuPN junction ye LED chip, zvinokonzeresa kubuda kwemagetsi uye kunyange kuparara. Uye zvakare, kana iyo photoresist iri pamusoro peiyo chip isina kupepetwa zvakachena, zvinokonzeresa kuomerwa uye chaiyo solder yepamberi solder mitsetse. Kana iri kumusana, inokonzerawo kuderera kwepamusoro. Munguva yekugadzira chip, nzira dzakaita sepamusoro roughening uye kucheka mune inverted trapezoidal zvimiro zvinogona kuwedzera kusimba kwechiedza.

Sei machipisi e LED akakamurwa kuita hukuru hwakasiyana? Ndeapi mhedzisiro yehukuru pane iyo photoelectric kuita kwe LED?
Saizi yemachipi e LED inogona kukamurwa kuita yakaderera-simba machipisi, epakati simba machipisi, uye epamusoro-simba machipisi zvinoenderana nesimba rawo. Zvinoenderana nezvinodiwa nevatengi, inogona kupatsanurwa muzvikamu senge single tube level, digital level, dot matrix level, uye yekushongedza mwenje. Kana iri saizi chaiyo yechip, zvinoenderana neiyo chaiyo yekugadzira nhanho yevakasiyana chip vanogadzira uye hapana chakanangana nezvinodiwa. Chero bedzi maitiro ari kusvika pachiyero, machipisi madiki anogona kuwedzera kuburitsa uye kuderedza mutengo, uye iyo optoelectronic performance haizoitike shanduko dzakakosha. Ikozvino inoshandiswa ne chip inonyatso hukama kune ikozvino density inoyerera kuburikidza nayo. Chipi chidiki chinoshandisa ikozvino shoma, nepo chip hombe inoshandisa yakawanda ikozvino. Uniti yavo yazvino density yakangofanana. Tichifunga kuti kupisa kupisa ndiyo nyaya huru pasi pepamusoro pemazuva ano, kushanda kwayo kunopenya kwakaderera pane iyo pasi pemazuva mashoma. Kune rumwe rutivi, sezvo nzvimbo inowedzera, kupikisa kwemuviri kwechiputi kunoderera, zvichiita kuti kuderera kwekufambisa mberi kwemhepo.

Ndeipi nzvimbo yakajairika ye LED yakakwira-simba machipisi? Sei?
LED yepamusoro-simba machipisi anoshandiswa mwenje chena anowanzo kuwanikwa mumusika kunosvika makumi mana emamiriyoni, uye mashandisirwo emagetsi epamusoro-simba machipisi anowanzo reva simba remagetsi pamusoro pe1W. Nekuda kwekuti quantum inoshanda kazhinji isingasviki 20%, simba remagetsi rakawanda rinoshandurwa kuita simba rekupisa, saka kupisa kwekupisa kwemachipisi emagetsi epamusoro kwakakosha uye kunoda machipisi kuti ave nenzvimbo yakakura.

Ndezvipi zvakasiyana zvinodiwa pakugadzirisa chip uye midziyo yekugadzirisa yekugadzira GaN epitaxial zvinhu zvichienzaniswa neGaP, GaAs, uye InGaAlP? Sei?
Iwo ma substrates eakajairwa dzvuku uye yero machipisi uye kupenya kwakanyanya quaternary tsvuku uye yero machipisi anogadzirwa neakasanganiswa semiconductor zvinhu zvakaita seGaP neGaAs, uye anogona kazhinji kugadzirwa muN-mhando substrates. Wet process inoshandiswa paphotolithography, uyezve madhaimondi ekukuya mavhiri anoshandiswa kucheka kuita machipisi. Iyo yebhuruu-yegirini chip yakagadzirwa neGaN zvinhu inoshandisa sapire substrate. Nekuda kweiyo insulating hunhu hwesafire substrate, haigone kushandiswa seimwe electrode ye LED. Naizvozvo, ese ari maviri eP/N maelectrodes anofanirwa kugadzirwa panguva imwe chete pamusoro peiyo epitaxial kuburikidza nekuoma etching process, uye mamwe maitiro ekufambisa anofanirwa kuitwa. Nekuda kwekuoma kwesafire, zvakaoma kuicheka kuita machipisi nedhaimondi rinokuya vhiri. Maitiro ayo ekugadzira anowanzo kuomarara uye akaomarara kupfuura maLED akagadzirwa neGaP kana GaAs zvinhu.

Chii chimiro uye maitiro e "transparent electrode" chip?
Iyo inonzi transparent electrode inoda kuve conductive uye pachena. Ichi chinyorwa chave kushandiswa zvakanyanya mukugadzirwa kwekristaro yemvura, uye zita rayo inonzi indium tin oxide, yakapfupikiswa seITO, asi haigone kushandiswa senge solder pad. Paunenge uchigadzira, tanga wagadzira ohmic electrode pamusoro peiyo chip, wozovhara pasi nejira reITO uye ndiro dhizaini ye solder pad paITO. Nenzira iyi, ikozvino inoburuka kubva kumutungamiri inogoverwa zvakaenzana kune imwe neimwe ohmic contact electrode kuburikidza neITO layer. Panguva imwecheteyo, ITO, nekuda kweiyo refractive index iri pakati peiyo yemhepo uye epitaxial zvinhu, inogona kuwedzera kona yekubuda kwechiedza uye inopenya inoyerera.

Ndeipi budiriro huru yechip tekinoroji yemwenje semiconductor?
Nekuvandudzwa kweiyo semiconductor LED tekinoroji, kushandiswa kwayo mumunda wekuvhenekesa kuri kuwedzera zvakare, kunyanya kubuda kweiyo chena LED, iyo yave nyaya inopisa mukuvhenekesa semiconductor. Nekudaro, kiyi chip uye yekurongedza matekinoroji ichiri kuda kuvandudzwa, uye maererano nemachipisi, isu tinofanirwa kuvandudza takanangana nepamusoro pesimba, yakakwirira mwenje kunyatsoshanda, uye kuderedzwa kwemafuta kuramba. Kuwedzera simba kunoreva kuwedzera kweiyo ikozvino inoshandiswa ne chip, uye nzira yakananga ndeyekuwedzera chip size. Iwo anowanzo shandiswa epamusoro-simba machipisi akatenderedza 1mm × 1mm, ane ikozvino ye350mA. Pamusana pekuwedzera kwekushandiswa kwemazuva ano, kupisa kwekushisa kwakava dambudziko rakakurumbira, uye ikozvino dambudziko iri rakanyatsogadziriswa kuburikidza nenzira ye chip inversion. Nekuvandudza tekinoroji yeLED, kushandiswa kwayo mumunda wekuvhenekesa kuchasangana nemikana isati yamboitika nematambudziko.

Chii chinonzi "flip chip"? Chimiro chayo chii? Ndezvipi zvakanakira zvayo?
Bhuruu LED inowanzoshandisa Al2O3 substrate, iyo ine kuoma kwakanyanya, kuderera kwekushisa uye magetsi conductivity. Kana chimiro chakanaka chikashandiswa, chichaunza matambudziko e-anti-static kune rumwe rutivi, uye kune rumwe rutivi, kupisa kupisa kuchavawo nyaya huru pasi pemamiriro ezvinhu epamusoro. Zvichakadaro, nekuda kwe electrode yakanaka yakatarisa kumusoro, chikamu chechiedza chichavharwa, zvichiita kuti kuderera kwekushanda kunopenya. Yakakwira simba rebhuruu LED inogona kuwana yakawedzera mwenje kubuda kuburikidza ne chip inversion tekinoroji pane yechinyakare yekurongedza tekinoroji.
Iyo mainstream inverted dhizaini nzira ikozvino ndeyekutanga kugadzirira mahombe ebhuruu LED machipisi ane akakodzera eutectic soldering electrode, uye panguva imwechete gadzira yakati kurei silicon substrate pane yebhuruu LED chip, wobva wagadzira goridhe conductive layer uye kuburitsa waya. layer (ultrasonic gold wire ball solder joint) ye eutectic soldering pairi. Zvadaro, iyo yepamusoro-simba yebhuruu LED chip inotengeswa kune iyo silicon substrate uchishandisa eutectic soldering michina.
Chimiro chechimiro ichi ndechokuti epitaxial layer inosangana zvakananga nesilicon substrate, uye kupisa kwekushisa kwesilicon substrate kwakaderera zvikuru kupfuura kwesapphire substrate, saka dambudziko rekupisa kupisa rinogadziriswa zvakanaka. Nekuda kweiyo inverted sapphire substrate yakatarisa kumusoro, inova iyo mwenje inoburitsa nzvimbo, uye safiri inoonekera, nokudaro kugadzirisa dambudziko rekubuda kwechiedza. Izvo zviri pamusoro ndiyo ruzivo rwakakodzera rwe LED tekinoroji. Isu tinotenda kuti nekuvandudzwa kwesainzi uye tekinoroji, marambi emangwana e LED anowedzera kushanda uye hupenyu hwavo hwesevhisi huchavandudzwa zvakanyanya, zvichitiunzira kurerukirwa.